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Laser Lift Off(LLO) for GaN LED Epitaxy

Laser Lift Off(LLO) refers to the technique that GaN sapphire substrate interface and GaN buffer layer separates by laser energy to realize GaN LED epitaxy and sapphire substrate separation. LLO is mainly adopted to solve the problem of GaN medium material growth.

The principle of LLO operation is when a laser pulse irradiates on to GaN thin film through the transparent sapphire substrate; the laser shall be absorbed by the GaN interface and the interface temperature raises. GaN epitaxy and sapphire substrate will separate when interface reaches internal temperature of900.

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